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From: Japanese-English Electronic Dictionary 和英電子辞書

 蒸着
 じょうちゃく
 noun (common) (futsuumeishi)
 noun or participle which takes the aux. verb suru
 see: 真空蒸着
 deposition (e.g. vacuum deposition)
 see: 蒸発
 vaporization
 evaporation
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